The Resource Thermal characterization of thin films for MEMS applications, by David J. Howe and Brian Morgan

Thermal characterization of thin films for MEMS applications, by David J. Howe and Brian Morgan

Label
Thermal characterization of thin films for MEMS applications
Title
Thermal characterization of thin films for MEMS applications
Statement of responsibility
by David J. Howe and Brian Morgan
Title variation
Thermal characterization of thin films for microelectromechanical systems applications
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
GPO
http://library.link/vocab/creatorName
Howe, David J
Government publication
federal national government publication
Index
no index present
Literary form
non fiction
Nature of contents
dictionaries
http://library.link/vocab/relatedWorkOrContributorName
  • Morgan, Brian
  • U.S. Army Research Laboratory
Series statement
ARL-TR
Series volume
4378
http://library.link/vocab/subjectName
Microelectromechanical systems
Label
Thermal characterization of thin films for MEMS applications, by David J. Howe and Brian Morgan
Link
http://purl.access.gpo.gov/GPO/LPS113054
Instantiates
Publication
Note
  • Title from title screen (viewed on May 26, 2009)
  • "February 2008."
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
17609061
Extent
iv, 14 pages
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
digital, PDF file.
System details
Mode of access: Internet from the ARL web site. Address as of 5/26/09: http://www.arl.army.mil/arlreports/2008/ARL-TR-4378.pdf ; current access is available via PURL
Label
Thermal characterization of thin films for MEMS applications, by David J. Howe and Brian Morgan
Link
http://purl.access.gpo.gov/GPO/LPS113054
Publication
Note
  • Title from title screen (viewed on May 26, 2009)
  • "February 2008."
Carrier category
online resource
Carrier category code
cr
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
17609061
Extent
iv, 14 pages
Form of item
electronic
Media category
computer
Media MARC source
rdamedia
Media type code
c
Other physical details
digital, PDF file.
System details
Mode of access: Internet from the ARL web site. Address as of 5/26/09: http://www.arl.army.mil/arlreports/2008/ARL-TR-4378.pdf ; current access is available via PURL

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      39.77004 -86.164015

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