Coverart for item
The Resource The capabilities and limitations of auger sputter profiling for studies of semiconductors, S.A. Schwarz ... [and others] ; sponsored by the Defense Advanced Research Projects Agency

The capabilities and limitations of auger sputter profiling for studies of semiconductors, S.A. Schwarz ... [and others] ; sponsored by the Defense Advanced Research Projects Agency

Label
The capabilities and limitations of auger sputter profiling for studies of semiconductors
Title
The capabilities and limitations of auger sputter profiling for studies of semiconductors
Statement of responsibility
S.A. Schwarz ... [and others] ; sponsored by the Defense Advanced Research Projects Agency
Contributor
Subject
Language
eng
Member of
Cataloging source
GPO
Government publication
federal national government publication
Illustrations
illustrations
Index
no index present
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Schwarz, S. A
  • United States
  • United States
Series statement
  • NBS special publication
  • Semiconductor measurement technology
Series volume
400-67
http://library.link/vocab/subjectName
  • Sputtering (Physics)
  • Metal oxide semiconductors
  • Semiconductors
Label
The capabilities and limitations of auger sputter profiling for studies of semiconductors, S.A. Schwarz ... [and others] ; sponsored by the Defense Advanced Research Projects Agency
Instantiates
Publication
Note
"Issued September 1981."
Bibliography note
Includes bibliographical references
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
17034682
Dimensions
26 cm.
Extent
vi, 46 pages
Lccn
81600003
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations
Label
The capabilities and limitations of auger sputter profiling for studies of semiconductors, S.A. Schwarz ... [and others] ; sponsored by the Defense Advanced Research Projects Agency
Publication
Note
"Issued September 1981."
Bibliography note
Includes bibliographical references
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
17034682
Dimensions
26 cm.
Extent
vi, 46 pages
Lccn
81600003
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations

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