Coverart for item
The Resource Semiconductor measurement technology : notes on SEM examination of microelectronic devices, John R. Devaney, K. O. Leedy and W. J. Keery

Semiconductor measurement technology : notes on SEM examination of microelectronic devices, John R. Devaney, K. O. Leedy and W. J. Keery

Label
Semiconductor measurement technology : notes on SEM examination of microelectronic devices
Title
Semiconductor measurement technology
Title remainder
notes on SEM examination of microelectronic devices
Statement of responsibility
John R. Devaney, K. O. Leedy and W. J. Keery
Creator
Contributor
Author
Subject
Language
eng
Related
Member of
Cataloging source
DLC
http://library.link/vocab/creatorName
Devaney, John R
Government publication
federal national government publication
Index
no index present
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorName
  • Leedy, Kathryn O.
  • Keery, W. J.
  • Institute for Applied Technology (U.S.)
  • United States
  • Hi-Rel Laboratories
Series statement
NBS special publication
Series volume
400-35
http://library.link/vocab/subjectName
  • Miniature electronic equipment
  • Semiconductors
  • Scanning electron microscopes
Label
Semiconductor measurement technology : notes on SEM examination of microelectronic devices, John R. Devaney, K. O. Leedy and W. J. Keery
Instantiates
Publication
Note
  • CODEN: XNBSAV
  • Work performed at Hi-Rel Laboratories under Contract 4-35897 in cooperation with the Electronics Technology Division
  • Jointly supported by Defense Advanced Research Projects Agency and National Bureau of Standards
  • Issued April 1977
Bibliography note
Bibliography: pages 47-48
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
16950227
Dimensions
26 cm.
Extent
iv, 48 pages, 1 unnumbered page
Lccn
77608011
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations
Label
Semiconductor measurement technology : notes on SEM examination of microelectronic devices, John R. Devaney, K. O. Leedy and W. J. Keery
Publication
Note
  • CODEN: XNBSAV
  • Work performed at Hi-Rel Laboratories under Contract 4-35897 in cooperation with the Electronics Technology Division
  • Jointly supported by Defense Advanced Research Projects Agency and National Bureau of Standards
  • Issued April 1977
Bibliography note
Bibliography: pages 47-48
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
16950227
Dimensions
26 cm.
Extent
iv, 48 pages, 1 unnumbered page
Lccn
77608011
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations

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