Coverart for item
The Resource Planar test structures for characterizing impurities in silicon, M. G. Buehler ... [and others] ; Electronic Technology Division

Planar test structures for characterizing impurities in silicon, M. G. Buehler ... [and others] ; Electronic Technology Division

Label
Planar test structures for characterizing impurities in silicon
Title
Planar test structures for characterizing impurities in silicon
Statement of responsibility
M. G. Buehler ... [and others] ; Electronic Technology Division
Contributor
Subject
Genre
Language
eng
Member of
Cataloging source
DLC
Government publication
federal national government publication
Illustrations
illustrations
Index
no index present
Literary form
non fiction
Nature of contents
bibliography
http://library.link/vocab/relatedWorkOrContributorName
  • Buehler, Martin G
  • Institute for Applied Technology (U.S.)
  • United States
  • United States
  • United States
Series statement
  • Semiconductor measurement technology
  • NBS special publication
Series volume
400-21
http://library.link/vocab/subjectName
  • Semiconductors
  • Silicon
Label
Planar test structures for characterizing impurities in silicon, M. G. Buehler ... [and others] ; Electronic Technology Division
Instantiates
Publication
Note
  • CODEN: XNBSAV
  • "Jointly supported by the National Bureau of Standards, the Defense Nuclear Agency, The Defense Advanced Research Projects Agency, and the Navy Strategic Systems Project Office."
Bibliography note
Includes bibliographical references
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
16936009
Dimensions
26 cm.
Extent
v, 25 pages, 1 unnumbered page
Lccn
75619390
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations
Label
Planar test structures for characterizing impurities in silicon, M. G. Buehler ... [and others] ; Electronic Technology Division
Publication
Note
  • CODEN: XNBSAV
  • "Jointly supported by the National Bureau of Standards, the Defense Nuclear Agency, The Defense Advanced Research Projects Agency, and the Navy Strategic Systems Project Office."
Bibliography note
Includes bibliographical references
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
16936009
Dimensions
26 cm.
Extent
v, 25 pages, 1 unnumbered page
Lccn
75619390
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations

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