The Resource Ion beam sputter etching, (microform)

Ion beam sputter etching, (microform)

Label
Ion beam sputter etching
Title
Ion beam sputter etching
Contributor
Subject
Language
eng
Member of
Cataloging source
GPO
Government publication
federal national government publication
Index
no index present
Literary form
non fiction
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United States
Series statement
NASA case
Series volume
no. LEW-13899-1
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  • Ion bombardment
  • Etching
Label
Ion beam sputter etching, (microform)
Instantiates
Publication
Note
  • Inventors: Bruce A. Banks, Sharon K. Rutledge
  • Filing date: September 13, 1985
  • Serial no.: 775,968
Control code
17369578
Extent
1 v.
Form of item
microfiche
Reproduction note
Microfiche.
Stock number
N 86-20587
Label
Ion beam sputter etching, (microform)
Publication
Note
  • Inventors: Bruce A. Banks, Sharon K. Rutledge
  • Filing date: September 13, 1985
  • Serial no.: 775,968
Control code
17369578
Extent
1 v.
Form of item
microfiche
Reproduction note
Microfiche.
Stock number
N 86-20587

Library Locations

    • Indiana State LibraryBorrow it
      315 W. Ohio St., Indianapolis, IN, 46202, US
      39.77004 -86.164015

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