The Resource Convection and chemistry effects in CVD, a 3-D analysis for silicon deposition, S.A. Gokoglu ... [and others]

Convection and chemistry effects in CVD, a 3-D analysis for silicon deposition, S.A. Gokoglu ... [and others]

Label
Convection and chemistry effects in CVD, a 3-D analysis for silicon deposition
Title
Convection and chemistry effects in CVD, a 3-D analysis for silicon deposition
Statement of responsibility
S.A. Gokoglu ... [and others]
Contributor
Subject
Language
eng
Member of
Cataloging source
GPO
Government publication
federal national government publication
Index
no index present
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorName
  • Gokoglu, Suleyman A.
  • United States
Series statement
NASA technical memorandum
Series volume
102001
http://library.link/vocab/subjectName
  • Vapor-plating
  • Silicon
Label
Convection and chemistry effects in CVD, a 3-D analysis for silicon deposition, S.A. Gokoglu ... [and others]
Instantiates
Publication
Note
Distributed to depository libraries in microfiche
Carrier category
microfiche
Carrier category code
he
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
17259513
Extent
1 volume.
Form of item
microfiche
Media category
microform
Media MARC source
rdamedia
Media type code
h
Reproduction note
Microfiche.
Stock number
N 89-21032
Label
Convection and chemistry effects in CVD, a 3-D analysis for silicon deposition, S.A. Gokoglu ... [and others]
Publication
Note
Distributed to depository libraries in microfiche
Carrier category
microfiche
Carrier category code
he
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
17259513
Extent
1 volume.
Form of item
microfiche
Media category
microform
Media MARC source
rdamedia
Media type code
h
Reproduction note
Microfiche.
Stock number
N 89-21032

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    • Indiana State LibraryBorrow it
      315 W. Ohio St., Indianapolis, IN, 46202, US
      39.77004 -86.164015

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