Coverart for item
The Resource Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics, A. Christou ; Naval Research Laboratory

Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics, A. Christou ; Naval Research Laboratory

Label
Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics
Title
Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics
Statement of responsibility
A. Christou ; Naval Research Laboratory
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
DLC
http://library.link/vocab/creatorName
Christou, A
Government publication
federal national government publication
Index
no index present
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorName
  • United States
  • Naval Research Laboratory (U.S.)
  • United States
Series statement
  • Semiconductor measurement technology
  • NBS special publication
Series volume
400-30
http://library.link/vocab/subjectName
  • Probes (Electronic instruments)
  • Semiconductor wafers
Label
Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics, A. Christou ; Naval Research Laboratory
Instantiates
Publication
Note
  • Prepared by Naval Research Laboratory
  • Activity sponsored by the Defense Advanced Research Projects Agency, through National Bureau of Standards
  • Issued April 1978
Bibliography note
Includes bibliographical references
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
16965671
Dimensions
26 cm.
Extent
v, 32 pages, 1 unnumbered page
Lccn
78002200
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations
Label
Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics, A. Christou ; Naval Research Laboratory
Publication
Note
  • Prepared by Naval Research Laboratory
  • Activity sponsored by the Defense Advanced Research Projects Agency, through National Bureau of Standards
  • Issued April 1978
Bibliography note
Includes bibliographical references
Carrier category
volume
Carrier category code
nc
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
16965671
Dimensions
26 cm.
Extent
v, 32 pages, 1 unnumbered page
Lccn
78002200
Media category
unmediated
Media MARC source
rdamedia
Media type code
n
Other physical details
illustrations

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