The Resource An overview of CVD processes, S. Okamoto

An overview of CVD processes, S. Okamoto

Label
An overview of CVD processes
Title
An overview of CVD processes
Statement of responsibility
S. Okamoto
Creator
Contributor
Subject
Language
eng
Member of
Cataloging source
GPO
http://library.link/vocab/creatorName
Okamoto, S
Government publication
federal national government publication
Index
no index present
Literary form
non fiction
http://library.link/vocab/relatedWorkOrContributorName
United States
Series statement
NASA technical memorandum
Series volume
NASA TM-88450
http://library.link/vocab/subjectName
Plasma-enhanced chemical vapor deposition
Label
An overview of CVD processes, S. Okamoto
Instantiates
Publication
Note
Distributed to depository libraries in microfiche
Carrier category
microfiche
Carrier category code
he
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
17155393
Extent
1 volume.
Form of item
microfiche
Media category
microform
Media MARC source
rdamedia
Media type code
h
Reproduction note
Microfiche.
Stock number
N 87-15283
Label
An overview of CVD processes, S. Okamoto
Publication
Note
Distributed to depository libraries in microfiche
Carrier category
microfiche
Carrier category code
he
Carrier MARC source
rdacarrier
Content category
text
Content type code
txt
Content type MARC source
rdacontent
Control code
17155393
Extent
1 volume.
Form of item
microfiche
Media category
microform
Media MARC source
rdamedia
Media type code
h
Reproduction note
Microfiche.
Stock number
N 87-15283

Library Locations

    • Indiana State LibraryBorrow it
      315 W. Ohio St., Indianapolis, IN, 46202, US
      39.77004 -86.164015

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